Rapid thermal oxidation of silicon monoxide

E. Fogarassy; A. Slaoui; C. Fuchs; J.L. Regolini

Journal Articles Applied Physics Letters Year : 1987

Rapid thermal oxidation of silicon monoxide

(1) , (1) , (1) ,

1

E. Fogarassy

Function : Author

Institut de Recherches Subatomiques

A. Slaoui

Function : Author

Institut de Recherches Subatomiques

C. Fuchs

Function : Author

Institut de Recherches Subatomiques

J.L. Regolini

Function : Author

Yvette Heyd : Connect in order to contact the contributor

https://hal.in2p3.fr/in2p3-00017596

Submitted on : Thursday, September 28, 2000-9:41:24 AM

Last modification on : Tuesday, November 7, 2023-11:28:04 AM

Dates and versions

in2p3-00017596 , version 1 (28-09-2000)

Identifiers

HAL Id : in2p3-00017596 , version 1

Cite

E. Fogarassy, A. Slaoui, C. Fuchs, J.L. Regolini. Rapid thermal oxidation of silicon monoxide. Applied Physics Letters, 1987, 51, pp.337. ⟨in2p3-00017596⟩

Rapid thermal oxidation of silicon monoxide

Dates and versions

Identifiers

Cite

Export

Collections

Share