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Journal Articles Applied Surface Science Year : 1987

Plasma transformation of SiO films in SiO$_2$ at room temperature

J. Perriere
  • Function : Author
B. Pelloie
  • Function : Author
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in2p3-00017602 , version 1 (28-09-2000)

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  • HAL Id : in2p3-00017602 , version 1

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J. Perriere, B. Pelloie, E. Fogarassy, A. Slaoui. Plasma transformation of SiO films in SiO$_2$ at room temperature. Applied Surface Science, 1987, 29, pp.433. ⟨in2p3-00017602⟩
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