Plasma transformation of SiO films in SiO$_2$ at room temperature

J. Perriere; B. Pelloie; E. Fogarassy; A. Slaoui

Journal Articles Applied Surface Science Year : 1987

Plasma transformation of SiO films in SiO$_2$ at room temperature

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1

J. Perriere

Function : Author

B. Pelloie

Function : Author

E. Fogarassy

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Institut de Recherches Subatomiques

A. Slaoui

Function : Author

Institut de Recherches Subatomiques

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Submitted on : Thursday, September 28, 2000-10:18:58 AM

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in2p3-00017602 , version 1 (28-09-2000)

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J. Perriere, B. Pelloie, E. Fogarassy, A. Slaoui. Plasma transformation of SiO films in SiO$_2$ at room temperature. Applied Surface Science, 1987, 29, pp.433. ⟨in2p3-00017602⟩

Plasma transformation of SiO films in SiO$_2$ at room temperature

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