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Journal Articles Applied physics. A, Materials science & processing Year : 1987

Characterization of thin silicon oxide obtained by lamp heating

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https://hal.in2p3.fr/in2p3-00017631

Submitted on : Thursday, September 28, 2000-2:00:35 PM

Last modification on : Friday, June 2, 2023-3:36:26 PM

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in2p3-00017631 , version 1 (28-09-2000)

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  • HAL Id : in2p3-00017631 , version 1

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A. Slaoui, J.P. Ponpon, P. Siffert. Characterization of thin silicon oxide obtained by lamp heating. Applied physics. A, Materials science & processing, 1987, 43, pp.301. ⟨in2p3-00017631⟩

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