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Journal Articles Applied Physics Letters Year : 1981

Interaction between arsenic hydrogen and silicon matrix in doping of sputtered amorphous hydrogenated silicon

M. Toulemonde
A. Deneuville
  • Function : Author
J.C. Bruyere
  • Function : Author
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in2p3-00017881 , version 1 (23-10-2000)

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  • HAL Id : in2p3-00017881 , version 1

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M. Toulemonde, P. Siffert, A. Deneuville, J.C. Bruyere. Interaction between arsenic hydrogen and silicon matrix in doping of sputtered amorphous hydrogenated silicon. Applied Physics Letters, 1981, 39, pp.152-154. ⟨in2p3-00017881⟩
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