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Journal Articles Radiation Effects Year : 1980

Laser annealing of silicon layers amorphized by molecular ions

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in2p3-00017909 , version 1 (27-10-2000)

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  • HAL Id : in2p3-00017909 , version 1

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J.C. Muller, J.J. Grob, A. Grob, R. Stuck, P. Siffert. Laser annealing of silicon layers amorphized by molecular ions. Radiation Effects, 1980, 48, pp.115. ⟨in2p3-00017909⟩
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