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Journal Articles Applied Physics Letters Year : 1978

Laser-beam annealing of heavily damaged implanted layers on silicon

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https://hal.in2p3.fr/in2p3-00018025

Submitted on : Wednesday, November 8, 2000-8:56:33 AM

Last modification on : Friday, June 2, 2023-3:36:26 PM

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in2p3-00018025 , version 1 (08-11-2000)

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  • HAL Id : in2p3-00018025 , version 1

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J.C. Muller, A. Grob, J.J. Grob, R. Stuck, P. Siffert. Laser-beam annealing of heavily damaged implanted layers on silicon. Applied Physics Letters, 1978, 33, pp.287-289. ⟨in2p3-00018025⟩

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