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Journal Articles Philosophical Magazine B Year : 1987

Analysis of the thermal contribution to UV laser-induced oxidation of silicon and silicon monoxide

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in2p3-00018826 , version 1 (23-01-2001)

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  • HAL Id : in2p3-00018826 , version 1

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E. Fogarassy, S. de Unamuno, J.L. Regolini, C. Fuchs. Analysis of the thermal contribution to UV laser-induced oxidation of silicon and silicon monoxide. Philosophical Magazine B, 1987, 55, pp.253-260. ⟨in2p3-00018826⟩
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