Low cost molecular ion implantation equipment - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Conference Papers Nuclear Instruments and Methods in Physics Research Year : 1981

Low cost molecular ion implantation equipment

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Dates and versions

in2p3-00019428 , version 1 (29-05-2001)

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  • HAL Id : in2p3-00019428 , version 1

Cite

J.C. Muller, P. Siffert. Low cost molecular ion implantation equipment. International Conference On Ion Implantation Equipment And Techniques 3, Jul 1980, Kingston, Canada. pp.205-210. ⟨in2p3-00019428⟩
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