Conference Papers
Nuclear Instruments and Methods in Physics Research
Year : 1981
Yvette Heyd : Connect in order to contact the contributor
https://hal.in2p3.fr/in2p3-00019428
Submitted on : Tuesday, May 29, 2001-4:13:16 PM
Last modification on : Friday, June 2, 2023-3:36:26 PM
Dates and versions
Identifiers
- HAL Id : in2p3-00019428 , version 1
Cite
J.C. Muller, P. Siffert. Low cost molecular ion implantation equipment. International Conference On Ion Implantation Equipment And Techniques 3, Jul 1980, Kingston, Canada. pp.205-210. ⟨in2p3-00019428⟩
Collections
5
View
0
Download