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Conference Papers Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 1985

Multiple-beam ion implantation setup for large scale treatment of semiconductors

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in2p3-00019430 , version 1 (29-05-2001)

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  • HAL Id : in2p3-00019430 , version 1

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J.C. Muller, E. Courcelle, D. Salles, P. Siffert. Multiple-beam ion implantation setup for large scale treatment of semiconductors. International Conference On Ion Implantation Equipment And Techniques 5, Jul 1984, Jeffersonville, United States. pp.394-398. ⟨in2p3-00019430⟩
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