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Journal Articles Journal of Applied Physics Year : 1992

Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures

M.C. Busch
  • Function : Author
E. Dooryhee
  • Function : Author
M. Toulemonde
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in2p3-00019443 , version 1 (30-05-2001)

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  • HAL Id : in2p3-00019443 , version 1

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M.C. Busch, A. Slaoui, P. Siffert, E. Dooryhee, M. Toulemonde. Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures. Journal of Applied Physics, 1992, 71, pp.2596-2601. ⟨in2p3-00019443⟩
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