Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures

M.C. Busch; A. Slaoui; P. Siffert; E. Dooryhee; M. Toulemonde

Journal Articles Journal of Applied Physics Year : 1992

Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures

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1

M.C. Busch

Function : Author

A. Slaoui

Function : Author

Institut de Recherches Subatomiques

P. Siffert

Function : Author

Institut de Recherches Subatomiques

E. Dooryhee

Function : Author

M. Toulemonde

Function : Author
PersonId : 743931
IdHAL : marcel-toulemonde

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Instrumentation and Detectors [physics.ins-det]

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https://hal.in2p3.fr/in2p3-00019443

Submitted on : Wednesday, May 30, 2001-10:07:47 AM

Last modification on : Friday, June 2, 2023-3:36:26 PM

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in2p3-00019443 , version 1 (30-05-2001)

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HAL Id : in2p3-00019443 , version 1

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M.C. Busch, A. Slaoui, P. Siffert, E. Dooryhee, M. Toulemonde. Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures. Journal of Applied Physics, 1992, 71, pp.2596-2601. ⟨in2p3-00019443⟩

Structural and electrical damage induced by high-energy heavy ions in SiO$_2$/Si structures

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