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Journal Articles Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 2003

Shrinkage mechanism of nanocavities in amorphous Si under ion irradiation: An in situ study

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in2p3-00022247 , version 1 (09-09-2004)

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  • HAL Id : in2p3-00022247 , version 1

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M.O. Ruault, M.C. Ridgway, F. Fortuna, H. Bernas, J.S. Williams. Shrinkage mechanism of nanocavities in amorphous Si under ion irradiation: An in situ study. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2003, 206, pp.912-915. ⟨in2p3-00022247⟩

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