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Compact waveguide-based power divider feeding independently any number of coaxial lines

Abstract : The device described in this paper has been designed to enable the feeding of many individual plasma sources from a single microwave generator, providing a noninterfering and constant supply of power to each coaxial line driving these plasma sources. The power coming from the generator flows through a waveguide under standing-wave conditions provided by the presence of a conducting plane located at the waveguide end opposite that linked to the generator. Power is extracted from the waveguide, at the maximum of intensity of the E-field standing wave, by a waveguide-to-coaxial-line transition designated as a probe. One or two probes can be set at each such maximum of field intensity (and this on both sides of the waveguide wide wall), yielding a compact power divider. Each coaxial line feeds a microwave field applicator, sustaining plasma, through a matching circuit comprising a tuning means and a ferrite isolator (circulator with a matched load), the latter ensuring that whatever happens to the plasma source, the other feeding lines are not affected. The conditions required for a perfect match of the microwave generator to the power divider are elaborated and examples of actual designs are presented
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Submitted on : Monday, November 26, 2007 - 4:11:39 PM
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J. Pollak, M. Moisan, Z. Zakrzewski, J. Pelletier, Y.A. Arnal, et al.. Compact waveguide-based power divider feeding independently any number of coaxial lines. IEEE Transactions on Microwave Theory and Techniques, Institute of Electrical and Electronics Engineers, 2007, 55 n° 5, pp.951-957. ⟨10.1109/TMTT.2007.895643⟩. ⟨in2p3-00192115⟩



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