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https://hal.in2p3.fr/in2p3-00697281
Submitted on : Tuesday, May 15, 2012-9:49:38 AM
Last modification on : Friday, June 2, 2023-3:36:26 PM
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- HAL Id : in2p3-00697281 , version 1
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P. Sortais, J. Médard. The multi beam sputtering: a new thin film deposition approach. 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), Apr 2012, San Diego, United States. ⟨in2p3-00697281⟩
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