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Tailoring of SiC nanoprecipitates formed in Si

Abstract : The SiC synthesis through single-beam of C+, and simultaneous-dual-beam of C+ & Si+ ion implantations into a Si substrate heated at 550 degrees C has been studied by means of three complementary analytical techniques: nuclear reaction analysis (NRA), Raman, and transmission electron microscopy (TEM). It is shown that a broad distribution of SiC nanoprecipitates is directly formed after simultaneous-dual-beam (520-keV C+ & 890-keV Si+) and single-beam (520-keV C+) ion implantations. Their shape appear as spherical (average size similar to 4-5 nm) and they are in epitaxial relationship with the silicon matrix. (C) 2013 Elsevier B.V. All rights reserved.
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Submitted on : Thursday, August 29, 2013 - 12:06:48 PM
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G. Velisa, P. Trocellier, L. Thome, S. Vaubaillon, S. Miro, et al.. Tailoring of SiC nanoprecipitates formed in Si. The 18th International Conference on Ion Beam Modifications of Materials (IBMM2012), Sep 2012, Jinan, China. pp.165-170, ⟨10.1016/j.nimb.2012.12.089⟩. ⟨in2p3-00852734⟩



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