Growth of magnesium hydride assisted by distributed microwave plasma sources: performance improvement through control of process parameters - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Conference Papers Year : 2014

Growth of magnesium hydride assisted by distributed microwave plasma sources: performance improvement through control of process parameters

A. Lacoste
  • Function : Author
  • PersonId : 1271176
Laboratoire de Physique Subatomique et de Cosmologie
L. Laversenne
Matériaux, Rayonnements, Structure

Domains

Plasma Physics [physics.plasm-ph]

Emmanuelle Vernay  : Connect in order to contact the contributor

https://hal.in2p3.fr/in2p3-00943153

Submitted on : Friday, February 7, 2014-9:54:20 AM

Last modification on : Wednesday, July 19, 2023-10:47:01 AM

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in2p3-00943153 , version 1 (07-02-2014)

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  • HAL Id : in2p3-00943153 , version 1

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A. Lacoste, L. Laversenne. Growth of magnesium hydride assisted by distributed microwave plasma sources: performance improvement through control of process parameters. 8th International Conference on Reactive Plasmas - 31st Symposium on Plasma Processing (ICRP-8/SPP-31), Feb 2014, Fukuoka, Japan. ⟨in2p3-00943153⟩

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