Skip to Main content Skip to Navigation
Journal articles

Alpha backscattering used in stoichiometry determination of thin sic coatings on si(100) wafers

Document type :
Journal articles
Complete list of metadata

http://hal.in2p3.fr/in2p3-00012931
Contributor : Sylvie Flores <>
Submitted on : Friday, February 5, 1999 - 12:30:28 PM
Last modification on : Thursday, February 4, 2021 - 3:06:07 PM

Identifiers

  • HAL Id : in2p3-00012931, version 1

Collections

Citation

R. Somatri, Jean-François Chailan, A. Chevarier, N. Chevarier, G. Ferro, et al.. Alpha backscattering used in stoichiometry determination of thin sic coatings on si(100) wafers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 1996, 113, pp.284-287. ⟨in2p3-00012931⟩

Share

Metrics

Record views

245