Alpha backscattering used in stoichiometry determination of thin sic coatings on si(100) wafers - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Journal Articles Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 1996

Alpha backscattering used in stoichiometry determination of thin sic coatings on si(100) wafers

Jean-François Chailan
G. Ferro
  • Function : Author
Y. Monteil
  • Function : Author
H. Vincent
  • Function : Author
J. Bouix
  • Function : Author
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Dates and versions

in2p3-00012931 , version 1 (05-02-1999)

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  • HAL Id : in2p3-00012931 , version 1

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R. Somatri, Jean-François Chailan, A. Chevarier, N. Chevarier, G. Ferro, et al.. Alpha backscattering used in stoichiometry determination of thin sic coatings on si(100) wafers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1996, 113, pp.284-287. ⟨in2p3-00012931⟩
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