Coupling modes in a dipolar microwave plasma source (2.45GHz)

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http://hal.in2p3.fr/in2p3-01217122
Contributor : Emmanuelle Vernay <>
Submitted on : Monday, October 19, 2015 - 10:08:03 AM
Last modification on : Tuesday, May 22, 2018 - 9:48:10 PM

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P. Baele, R. Maurau, S. Béchu, A. Bès, A. Lacoste. Coupling modes in a dipolar microwave plasma source (2.45GHz). 9th International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference, 33rd Symposium on Plasma Processing (ICRP-9, GEC-68, SPP-33), Oct 2015, Honolulu, United States. ⟨in2p3-01217122⟩

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