Skip to Main content Skip to Navigation
Conference papers

Coupling modes in a dipolar microwave plasma source (2.45GHz)

Document type :
Conference papers
Complete list of metadata

http://hal.in2p3.fr/in2p3-01217122
Contributor : Emmanuelle Vernay Connect in order to contact the contributor
Submitted on : Monday, October 19, 2015 - 10:08:03 AM
Last modification on : Wednesday, November 17, 2021 - 2:46:34 PM

Identifiers

  • HAL Id : in2p3-01217122, version 1

Collections

IN2P3 | LPSC | CNRS | GEPI | UGA

Citation

P. Baele, R. Maurau, Stéphane Béchu, A. Bès, A. Lacoste. Coupling modes in a dipolar microwave plasma source (2.45GHz). 9th International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference, 33rd Symposium on Plasma Processing (ICRP-9, GEC-68, SPP-33), Oct 2015, Honolulu, United States. ⟨in2p3-01217122⟩

Share

Metrics

Les métriques sont temporairement indisponibles