Transverse straggling of MeV oxygen ions implanted in silicon

J.J. Grob; A. Grob; P. Thevenin; P. Siffert

Journal Articles Nuclear Instruments and Methods Year : 1988

Transverse straggling of MeV oxygen ions implanted in silicon

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J.J. Grob

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Institut de Recherches Subatomiques

A. Grob

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Institut de Recherches Subatomiques

P. Thevenin

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P. Siffert

Function : Author

Institut de Recherches Subatomiques

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in2p3-00017486 , version 1 (26-09-2000)

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J.J. Grob, A. Grob, P. Thevenin, P. Siffert. Transverse straggling of MeV oxygen ions implanted in silicon. Nuclear Instruments and Methods, 1988, 34, pp.830. ⟨in2p3-00017486⟩

Transverse straggling of MeV oxygen ions implanted in silicon

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