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Conference Papers Year : 1976

Damage profiles and annealing of Si(B) implants

R. Prisslinger
  • Function : Author
S. Kalbitzer
  • Function : Author
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Dates and versions

in2p3-00019492 , version 1 (31-05-2001)

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  • HAL Id : in2p3-00019492 , version 1

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J.J. Grob, P. Siffert, R. Prisslinger, S. Kalbitzer. Damage profiles and annealing of Si(B) implants. International Conference On Applications Of Ion Beams To Materials, Sep 1975, Warwick, United Kingdom. pp.24-30. ⟨in2p3-00019492⟩
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