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Conference Papers Year : 1976

Damage profiles and annealing of Si(B) implants

J.J. Grob
  • Function : Author
Institut de Recherches Subatomiques
P. Siffert
  • Function : Author
Institut de Recherches Subatomiques
R. Prisslinger
  • Function : Author
S. Kalbitzer
  • Function : Author

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https://hal.in2p3.fr/in2p3-00019492

Submitted on : Thursday, May 31, 2001-2:57:12 PM

Last modification on : Friday, June 2, 2023-3:36:26 PM

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in2p3-00019492 , version 1 (31-05-2001)

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  • HAL Id : in2p3-00019492 , version 1

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J.J. Grob, P. Siffert, R. Prisslinger, S. Kalbitzer. Damage profiles and annealing of Si(B) implants. International Conference On Applications Of Ion Beams To Materials, Sep 1975, Warwick, United Kingdom. pp.24-30. ⟨in2p3-00019492⟩

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