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Journal Articles International Journal of Inorganic Materials Year : 2001

Antimony dopant redistribution during copper silicide formation

M. Benkerri
  • Function : Author
R. Halimi
  • Function : Author
A. Bouabellou
  • Function : Author
A. Mosser
  • Function : Author
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Dates and versions

in2p3-00020051 , version 1 (10-07-2003)

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  • HAL Id : in2p3-00020051 , version 1

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M. Benkerri, R. Halimi, A. Bouabellou, A. Mosser, J.P. Sens. Antimony dopant redistribution during copper silicide formation. International Journal of Inorganic Materials, 2001, 3, pp.1299-1301. ⟨in2p3-00020051⟩
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