Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications - Archive ouverte HAL Access content directly
Conference Papers Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Year : 2000

Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications

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in2p3-00022842 , version 1 (09-05-2000)

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  • HAL Id : in2p3-00022842 , version 1

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P. Camus, L. Berge, L. Dumoulin, S. Marnieros, J.P. Torre. Low temperature NbSi thin film thermometers on Silicon Nitride membranes for bolometer applications. International workshop on low temperature detectors 8 LTD-8, Aug 1999, Dalfsen, Netherlands. pp.419-422. ⟨in2p3-00022842⟩
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