High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers - Archive ouverte HAL Access content directly
Journal Articles Journal of Applied Physics Year : 2013

High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

, , , , , , , , (1) , (2) , (2)
1
2
F.A. Torres
  • Function : Author
P. Meng
  • Function : Author
L. Ju
  • Function : Author
C. Zhao
  • Function : Author
D.G. Blair
  • Function : Author
K.-Y. Liu
  • Function : Author
S. Chao
  • Function : Author
M. Martyniuk
  • Function : Author

Abstract

Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic parametric devices, high quality factor resonators are required. We present millimetre-scale silicon resonators designed to exhibit a torsional vibration mode with a frequency in the 105-106 Hz range, for observation of 3-mode optoacoustic interactions in a compact table-top system. Our design incorporates an isolation stage and minimizes the acoustic loss from optical coating. We observe a quality factor of 7.5 × 105 for a mode frequency of 401.5 kHz, at room temperature and pressure of 10-3 Pa. We confirmed the mode shape by mapping the amplitude response across the resonator and comparing to finite element modelling. This study contributes to the development of 3-mode optoacoustic parametric amplifiers for use in novel high-sensitivity signal transducers and quantum measurement experiments.
Fichier principal
Vignette du fichier
1303.6595.pdf (280.22 Ko) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

in2p3-00859697 , version 1 (26-08-2022)

Identifiers

Cite

F.A. Torres, P. Meng, L. Ju, C. Zhao, D.G. Blair, et al.. High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers. Journal of Applied Physics, 2013, 114, pp.014506. ⟨10.1063/1.4812731⟩. ⟨in2p3-00859697⟩
20 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More