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Communication Dans Un Congrès Année : 2015

Emission spectroscopy of dipolar plasma source in low pressure hydrogen

Yu. A. Lebedev
  • Fonction : Auteur
V.A. Shakhatov
  • Fonction : Auteur

Résumé

Method of emission spectroscopy was used to study the plasma characteristics of the dipolar plasma source [1] in hydrogen at pressures 0.001 – 0.01 Torr, microwave power 200-1200 W, microwave frequency 2.45 GHz. Spectral composition of plasma emission was investigated in the range of wave length 601–627 nm. Functions of distributions over rotational (J=1–5) and vibrational (v=0–2) levels were determined for excited state d3П- u of hydrogen molecules. Gas temperature Tg, rotational Trot(d3П- u) and vibrational Tv(X1+ g) temperatures were determined on the basis of collisional-radiative models [2-4]. It was found that the distribution function for the lower rotational levels of H2(d3П- u) is Boltzmann distribution. Temperature Trot(d3П- u) changes in the range 205–325 K. The distribution function for the lower vibrational levels of H2 in the excited state d3П- u differs from the Boltzmann distribution. The magnitude of the vibrational temperature is 3100400 K, translational temperature is in the range 420-650 K. The obtained values of Tg and Tv(X1+ g) suggests that the discharge at low pressures in hydrogen is an effective source of vibrationally excited hydrogen molecules. This study was supported in part by RFBR grant # 15-08-00070.
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Dates et versions

in2p3-01231366 , version 1 (20-11-2015)

Identifiants

  • HAL Id : in2p3-01231366 , version 1

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Stéphane Béchu, A. Lacoste, Yu. A. Lebedev, V.A. Shakhatov. Emission spectroscopy of dipolar plasma source in low pressure hydrogen. 9th International Workshop on Microwave Discharges: Fundamentals and Applications, (MD 9), Sep 2015, Cordoba, Spain. ⟨in2p3-01231366⟩
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