Study of the plasma near the plasma electrode by probes and photodetachment in ECR-driven negative ion source
Résumé
The effect of the plasma electrode bias on the plasma characteristics near the extraction aperture in a large volume hybrid multicusp negative ion source, driven by 2.45 GHz microwaves, is reported. Spatially resolved negative ion and electron density measurements were performed under various pressures (1-4 mTorr) by means of electrostatic probe and photodetachment technique.
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